ITEE Ph.D confirmation seminar: Yang David Hong, 11.00AM, Thu 07 Aug 2003

Modelling and Inverse Modelling Of Scanning Capacitance Microscopy For Dopant Profile Extraction

Speaker: Yang David Hong, ITEE

When: 11.00AM, Thursday 07 Aug 2003

Venue: 78-420

Host: Associate Professor YT Yeow

Abstract:

  Scanning capacitance microscopy (SCM) is becoming a powerful tool
  for dopant profile extraction for deep submicron silicon integrated
  circuits. It is based on high-frequency response of the MOS
  capacitor between the SCM probe and the underlying semiconductor. In
  early applications of SCM, a change in capacitance at any point on
  the semiconductor surface in response to a change in bias is
  measured and converted to dopant concentration at that point by
  using calibration curves derived from SCM measurement on known
  uniformly doped substrates. The approach suffers from the fact that
  in the presence of a lateral source of minority carriers (such as in
  the space charge region of a pn-junction) where the change in
  capacitance deviates significantly from the prediction of the
  calibration curves. Better understanding of carrier response to SCM
  signal and new quantitative approaches in junction dopant profiling
  are needed to fully exploit the nanometer-scale spatial resolution
  of SCM and to extend it beyond the status of a junction
  visualization tool.

  This seminar will cover an introduction to SCM measurement and
  numerical modelling of SCM measurement, simulation study of
  measurement/material variables affecting SCM data, comparison of
  experimental and simulation results of p-n junctions and some
  consideration of the approaches to be adopted for inverse modelling
  for accurate extraction of junction dopant profile.

Biography:

  Yang David Hong received the BE(1st Class Hons) degree in Electrical
  Engineering from the University of Queensland, Australia in
  2000. From 2001 to 2002 he worked in Motorola, Singapore as a
  software engineer for embedded systems in mobile
  communication. Since 2002 he has been a Ph.D student with the School
  of Information Technology and Electrical Engineering at the
  University of Queensland.

Type:

Ph.D confirmation

Contact:

Associate Professor YT Yeow, seminar host (yty@itee.uq.edu.au)
or Guido Governatori (ITEE seminar co-ordinator) (guido@itee.uq.edu.au)

ITEE seminar web page: http://www.itee.uq.edu.au/~seminar

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